PublizoomAward notice Supplies
Feol etch cluster
Notice published in Dutch. The AI analysis summarises it for you in your language.
- Public buyer
- Imec EU Pilot line NV
Heverlee - Place of performance
- 3001 Heverlee, Flemish Brabant
not published: buyer's address - Bids received
- 3
- Procedure
- Competitive negotiated procedure
You first submit an application; shortlisted candidates bid, then negotiate with the buyer. - Publication
- 21 July 2026
- Notice language
- Dutch
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Description
300mm Dry Etch Platform bestaande uit een Process Module zoals hieronder omschreven: i. Conductor Dry Ether met ICP (Inductively Coupled Plasma) RF Source Power en Dual Bottom Bias capability (RF Bias + DC Pulse Bias aan 400kHz) ii. Deze Process Module moet het vermogen hebben om RF Bias en DC Bias te superponeren.
Deze Process Module is bedoeld voor verschillende FEOL-toepassingen voor N2 technologie node en verder, in het bijzonder CFET (Complementary Field Effect Transistor) toepassingen inclusief maar niet beperkt tot CFET Nanosheet Etch, CFET Full Gate Etch en CFET Source/Drain Recess. Er moeten minimaal 6 procesmoduleslots beschikbaar zijn op het platform voor een mogelijke capaciteits- en functionaliteitsupgrade. Het platform moet minimaal 5 laadpoorten bevatten.
Awarded to
CPV codes
European codes that classify what the contract is about. They are how we find the tenders for your trade.
38000000
Winning prices for comparable contracts
- A quarter below
- €251,579
- Median
- €391,000
- A quarter above
- €678,903
Amounts awarded (excl. VAT) over the last 3 years for 127 contracts in the same CPV group (3800…), excluding framework agreements. Half of the contracts fall between the two quartiles. TED source: mostly contracts above the EU thresholds, so amounts tend to be high.
Similar contracts already awarded
| Contract | Winner | Amount |
|---|---|---|
| TDV ETCH Imec EU Pilot line NV · 2 October 2026 |
Tokyo Electron Limited | – |
| Automated TEM Analysis Platform Imec EU Pilot line NV · 2 October 2026 |
FEI EUROPE BV | – |
| Euv track (hna/lna) Imec EU Pilot line NV · 2 October 2026 |
Tokyo Electron Europe Limited | – |
| Ir laser debonder Imec EU Pilot line NV · 2 October 2026 |
EV Group Europe & Asia/Pacific GmbH | – |
| Automatic Capillary Underfill Dispense System Imec EU Pilot line NV · 2 October 2026 |
MUSASHI ENGINEERING, INC. | – |
Source : TED – Office des publications de l'Union européenne © Union européenne, données retraitées. Reference 503557-2026.