PublizoomAward notice Supplies
Euv track (hna/lna)
Notice published in Dutch. The AI analysis summarises it for you in your language.
- Public buyer
- Imec EU Pilot line NV
Heverlee - Place of performance
- 3001 Heverlee, Flemish Brabant
not published: buyer's address - Bids received
- 1
- Form
- Framework agreement
Multi-year contract: the buyer places orders as needs arise. - Procedure
- Negotiated procedure without prior publication
The buyer consulted a few companies directly: it is no longer possible to take part. - Publication
- 2 October 2026
- Notice language
- Dutch
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Description
The high NA - EUV track will support a High NA EUV scanner it gets linked to. The track will prepare the wafers before the exposure, this is pre-treatment of the wafers before coating, the coating of underlayer and photo resist followed by a post application bake. After exposure the track will execute the post exposure bake and development of the photo sensitive material to get the pattern fixed.
The track modules need to be precisely controlled to achieve superior results in uniformity within the wafer and from wafer to wafer. It also needs to enable the processing of a wide variety of materials to support the further scaling and continuous evolving semiconductor devices. The low NA - EUV track will support a Low NA EUV scanner it gets linked to.
The track will prepare the wafers before the exposure, this is pre-treatment of the wafers before coating, the coating of underlayer and photo resist followed by a post application bake. After exposure the track will execute the post exposure bake and development of the photo sensitive material to get the pattern fixed. The track modules need to be precisely controlled to achieve superior results in uniformity within the wafer and from wafer to wafer.
It also needs to enable the processing of a wide variety of materials to support the further scaling and continuous evolving semiconductor devices.
Awarded to
2 lots
- JPA2025ID03/55 - 1
- JPA2025ID03/55 - 2
CPV codes
European codes that classify what the contract is about. They are how we find the tenders for your trade.
38000000
Winning prices for comparable contracts
- A quarter below
- €251,579
- Median
- €391,000
- A quarter above
- €678,903
Amounts awarded (excl. VAT) over the last 3 years for 127 contracts in the same CPV group (3800…), excluding framework agreements. Half of the contracts fall between the two quartiles. TED source: mostly contracts above the EU thresholds, so amounts tend to be high.
Similar contracts already awarded
| Contract | Winner | Amount |
|---|---|---|
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Source : TED – Office des publications de l'Union européenne © Union européenne, données retraitées. Reference 680011-2026.