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Award notice Supplies

Wafer metrology

Public buyer
VTT Technical Research Centre of Finland Ltd
VTT
Place of performance
Espoo
Amount awarded
€464,674 excl. VAT
Planned end of contract
1 July 2029
likely re-tender around January 2029
Bids received
1
Procedure
Open procedure
Any company may submit a bid.
Publication
31 August 2026
Notice language
English

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Description

The object of the tender was semi-automatic wafer metrology tool (later also “tool”) for measurement of total thickness, TTV (total thickness variation), warp, bow, metallization bumps, trench or via depth and geometric factors in substrates typical in semiconductor industry such as but not limited to silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides, or/and thin materials deposited. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.

Awarded to

CPV codes

European codes that classify what the contract is about. They are how we find the tenders for your trade.

38000000 38300000

Winning prices for comparable contracts

A quarter below
€193,600
Median
€418,300
A quarter above
€602,500

Amounts awarded (excl. VAT) over the last 3 years for 32 contracts in the same CPV group (3800…), excluding framework agreements. Half of the contracts fall between the two quartiles. TED source: mostly contracts above the EU thresholds, so amounts tend to be high.

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Source : TED – Office des publications de l'Union européenne © Union européenne, données retraitées. Reference 598555-2026.